A CMOS-compatible device for fluid density measurements fabricated by sacrificial aluminium etching
| Autor: | Westberg, David a, *, Paul, Oliver b, Andersson, Gert I. a, Baltes, Henry a |
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| Zdroj: | In Sensors & Actuators: A. Physical 1999 73(3):243-251 |
| Databáze: | ScienceDirect |
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