Average power control and positioning of polysilicon thermal actuators
| Autor: | Butler, Jeffrey T. a, *, Bright, Victor M. b, Cowan, William D. a |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1999 72(1):88-97 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Butler, Jeffrey T. a, *, Bright, Victor M. b, Cowan, William D. a |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1999 72(1):88-97 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect