A long-stroke MEMS actuator based on cascaded stages of innovative pass-through comb fingers
| Autor: | Banani, Yassine a, 1, Buffoli, Andrea b, 1, Mauri, Flavia D. b, Opreni, Andrea a, Frangi, Attilio a, Gattere, Gabriele c, Langfelder, Giacomo b, Zega, Valentina a, ⁎ |
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| Zdroj: | In Sensors and Actuators: A. Physical 1 February 2025 382 |
| Databáze: | ScienceDirect |
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