Quasi-closed diaphragm based piezoelectric micromachined ultrasonic transducer with reduced Q and stress sensitivity for in-air rangefinding
| Autor: | Wang, Yan, Chen, Peng, Zhang, Junning, Yu, Hongbin |
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| Zdroj: | In Sensors and Actuators: A. Physical 1 December 2024 379 |
| Databáze: | ScienceDirect |
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