Modeling and compensation of a hollow XY stage based on hybrid reluctance actuators
| Autor: | Li, Weipeng, Yu, Weidong, Dai, Zhengyan, Huang, Hai, Chen, Wenyuan |
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| Zdroj: | In Sensors and Actuators: A. Physical 1 December 2024 379 |
| Databáze: | ScienceDirect |
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