AlScN-based quasi-static multi-degree-of-freedom piezoelectric MEMS micromirror with large mirror plate and high fill factor
| Autor: | Zhang, Junning, Wang, Yan, Chen, Peng, Lv, Tunan, Yu, Hongbin |
|---|---|
| Zdroj: | In Sensors and Actuators: A. Physical 1 December 2024 379 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect