Process for integrating multiple porous silicon membranes with variable characteristics into planar microfluidics
| Autor: | Silva de Vasconcellos, Douglas, Bourrier, David, Imbernon, Eric, Hajdu, Kata, He, Yingning, Leïchlé, Thierry |
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| Zdroj: | In Sensors and Actuators: A. Physical 16 October 2024 377 |
| Databáze: | ScienceDirect |
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