An XYZ parallel nanopositioning stage with hybrid damping
| Autor: | Chen, Zhong, Qiu, Yuliang, Zhong, Xineng, Zhang, Xianmin |
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| Zdroj: | In Sensors and Actuators: A. Physical 16 October 2024 377 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Chen, Zhong, Qiu, Yuliang, Zhong, Xineng, Zhang, Xianmin |
|---|---|
| Zdroj: | In Sensors and Actuators: A. Physical 16 October 2024 377 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect