Electrical aging of a piezoelectric MEMS fast steering mirror and its impact on reliability
| Autor: | Zhu, Weihong, Su, Yongquan, Gao, Shiyuan, Li, Xiaodong, Zhang, Yonggui, Wang, Lihao, Liu, Yichen, Wang, Yang, Wu, Zhenyu |
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| Zdroj: | In Sensors and Actuators: A. Physical 1 October 2024 376 |
| Databáze: | ScienceDirect |
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