Effect of overheat and direct flow loading on the MEMS bistable flow sensor
| Autor: | Litvinov, Ivan, Refaeli, Dan, Liberzon, Alex, Krylov, Slava |
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| Zdroj: | In Sensors and Actuators: A. Physical 1 July 2024 372 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Litvinov, Ivan, Refaeli, Dan, Liberzon, Alex, Krylov, Slava |
|---|---|
| Zdroj: | In Sensors and Actuators: A. Physical 1 July 2024 372 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect