A polymer trench filling based silicon isolation technique and its application to two-axis scanning comb-drive micromirrors
| Autor: | Cao, Yingchao, Ding, Yingtao, wang, Hua, Yan, Yangyang, Qi, Qiangxian, Jia, Yilong, Wu, Yekai, Xie, Huikai |
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| Zdroj: | In Sensors and Actuators: A. Physical 1 May 2024 370 |
| Databáze: | ScienceDirect |
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