Enhanced high-frequency piezoelectric ultrasonic transducer based on integrated AlN honeycomb structure

Autor: Duan, Xiaoya, Li, Penglu, Wu, Chunsheng, Cui, Danfeng, Xue, Chenyang
Zdroj: In Sensors and Actuators: A. Physical 1 July 2024 372
Databáze: ScienceDirect