On the design of piezoelectric MEMS scanning mirror for large reflection area and wide scan angle
| Autor: | Cheng, Hao-Chien, Liu, Shi-Chi, Hsu, Chih-Chen, Lin, Hung-Yu, Shih, Fuchi, Wu, Mingching, Liang, Kai-Chih, Lai, Mei-Feng, Fang, Weileun |
|---|---|
| Zdroj: | In Sensors and Actuators: A. Physical 1 January 2023 349 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect