Fabrication and characterization of row-column addressed pMUT array with monocrystalline PZT thin film toward creating ultrasonic imager
| Autor: | Liu, Ziyi, Yoshida, Shinya, Horsley, David A., Tanaka, Shuji |
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| Zdroj: | In Sensors and Actuators: A. Physical 1 August 2022 342 |
| Databáze: | ScienceDirect |
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