Simultaneous tip force and displacement sensing for AFM cantilevers with on-chip actuation: Design and characterization for off-resonance tapping mode

Autor:	Bem, Natã F.S. de, Ruppert, Michael G., Fleming, Andrew J., Yong, Yuen K.
Zdroj:	In Sensors and Actuators: A. Physical 1 May 2022 338
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect