Scanning optimization of an electrothermally-actuated MEMS mirror for applications in optical coherence tomography endoscopy

Autor: Liu, Tailong, Pan, Teng, Wang, Peng, Qin, Shuijie, Xie, Huikai
Zdroj: In Sensors and Actuators: A. Physical 1 March 2022 335
Databáze: ScienceDirect