Optical diagnostic of LiNbO3 etching in NF3/Ar ICP plasma: Part I
| Autor: | Osipov, Artem, Alexandrov, Sergey, Berezenko, Vladimir, Speshilova, Anastasiya, Alexandr, Vorobyev, Osipov, Armenak |
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| Zdroj: | In Sensors and Actuators: A. Physical 16 April 2022 337 |
| Databáze: | ScienceDirect |
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