A temperature compensated biaxial eFM accelerometer in Epi-seal process
| Autor: | Shin, Seungyong, Kwon, Hyun-Keun, Vukasin, Gabrielle D., Kenny, Thomas W., Ayazi, Farrokh |
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| Zdroj: | In Sensors and Actuators: A. Physical 15 October 2021 330 |
| Databáze: | ScienceDirect |
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