A flexible high quality-factor bulk acoustic resonator enabled with transferred single-crystal piezoelectric thin film for sensing applications
| Autor: | Xue, Yanmei, Zhou, Changjian, Zhang, Xiu Yin, Chan, Mansun |
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| Zdroj: | In Sensors and Actuators: A. Physical 1 August 2021 326 |
| Databáze: | ScienceDirect |
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