A piezoelectric AlN MEMS hydrophone with high sensitivity and low noise density
| Autor: | Yang, Dengfei, Yang, Lei, Chen, Xuying, Qu, Mengjiao, Zhu, Ke, Ding, Hong, Li, Dongsheng, Bai, Yun, Ling, Jian, Xu, Jinghui, Xie, Jin |
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| Zdroj: | In Sensors and Actuators: A. Physical 1 February 2021 318 |
| Databáze: | ScienceDirect |
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