Piezoresistive pressure sensor using nanocrystalline silicon thin film on flexible substrate
| Autor: | Pandey, Vivek, Mandal, Aparajita, Sisle, Swapnil, Gururajan, M.P., Dusane, R.O. |
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| Zdroj: | In Sensors and Actuators: A. Physical 1 December 2020 316 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect