Effect of biaxial curvature on the resonance frequency of uncoated microcantilevers

Autor: Balasubramanian, S., Prabakar, K., Aditi, Mukhiya, Ravindra, Tripura Sundari, S.
Zdroj: In Sensors and Actuators: A. Physical 1 April 2020 304
Databáze: ScienceDirect