19-picometer mechanical step displacement measurement using heterodyne interferometer with phase-locked loop and piezoelectric driving flexure-stage
| Autor: | Nguyen, Thanh Dong, Duong, Quang Anh, Higuchi, Masato, Vu, Thanh Tung, Wei, Dong, Aketagawa, Masato |
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| Zdroj: | In Sensors and Actuators: A. Physical 1 April 2020 304 |
| Databáze: | ScienceDirect |
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