Electro-mechanical properties of multilayered aluminum nitride and platinum thin films at high temperatures
| Autor: | Schmid, P., Triendl, F., Zarfl, C., Schwarz, S., Artner, W., Schneider, M., Schmid, U. |
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| Zdroj: | In Sensors & Actuators: A. Physical 1 July 2019 293:128-135 |
| Databáze: | ScienceDirect |
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