Rapid and low power laser actuation of sputter-deposited NiTi shape memory alloy (SMA) MEMS thermal bimorph actuators
Autor: | Knick, Cory R., Smith, Gabriel L., Morris, Christopher J., Bruck, Hugh A. |
---|---|
Zdroj: | In Sensors & Actuators: A. Physical 1 June 2019 291:48-57 |
Databáze: | ScienceDirect |
Externí odkaz: |