Rapid and low power laser actuation of sputter-deposited NiTi shape memory alloy (SMA) MEMS thermal bimorph actuators
| Autor: | Knick, Cory R., Smith, Gabriel L., Morris, Christopher J., Bruck, Hugh A. |
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| Zdroj: | In Sensors & Actuators: A. Physical 1 June 2019 291:48-57 |
| Databáze: | ScienceDirect |
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