A sacrificial-layer-free fabrication technology for MEMS transducer on flexible substrate
| Autor: | Ge, Chang, Cretu, Edmond |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1 February 2019 286:202-210 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Ge, Chang, Cretu, Edmond |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1 February 2019 286:202-210 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect