Reduced-gap CMUT implementation in PolyMUMPs for air-coupled and underwater applications
| Autor: | Tawfik, Hani H., Alsaiary, Tariq, Elsayed, Mohannad Y., Nabki, Frederic, El-Gamal, Mourad N. |
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| Zdroj: | In Sensors & Actuators: A. Physical 1 August 2019 294:102-115 |
| Databáze: | ScienceDirect |
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