Piezoelectric MEMS with multilayered Pb(Zr,Ti)O3 thin films for energy harvesting
| Autor: | Kanda, Kensuke, Hirai, Shota, Fujita, Takayuki, Maenaka, Kazusuke |
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| Zdroj: | In Sensors and Actuators: A. Physical 1 October 2018 281:229-235 |
| Databáze: | ScienceDirect |
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