A liquid MEMS inclinometer sensor with improved sensitivity
| Autor: | Xu, Han-yang, Zhao, Yu-long, Zhang, Kai, Wang, Zi-xi, Jiang, Kyle |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1 January 2019 285:369-377 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Xu, Han-yang, Zhao, Yu-long, Zhang, Kai, Wang, Zi-xi, Jiang, Kyle |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1 January 2019 285:369-377 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect