Design and fabrication of SU-8 CMUT arrays through grayscale lithography
Autor: | Ge, Chang, Cretu, Edmond |
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Zdroj: | In Sensors and Actuators: A. Physical 1 September 2018 280:368-375 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Ge, Chang, Cretu, Edmond |
---|---|
Zdroj: | In Sensors and Actuators: A. Physical 1 September 2018 280:368-375 |
Databáze: | ScienceDirect |
Externí odkaz: |