A CMOS compatible micro-Pirani vacuum sensor based on mutual heat transfer with 5-decade operating range and 0.3 Pa detection limit
| Autor: | Piotto, Massimo, Del Cesta, Simone, Bruschi, Paolo |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 15 August 2017 263:718-726 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect