Electro-mechanical modelling and experimental characterization of a high-aspect-ratio electrostatic-capacitive MEMS device

Autor:	Cerini, F., Ferrari, M., Ferrari, V., Russo, A., Azpeitia Urquia, M., Ardito, R., De Masi, B., Sedmik, R.I.P.
Zdroj:	In Sensors & Actuators: A. Physical 15 October 2017 266:219-231
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect