Electrical characterization of thin-film silicon flexural resonators in linear and nonlinear regimes of motion for integration with electronics
| Autor: | Mouro, J., Teagno, L., Gualdino, A., Chu, V., Conde, J.P. |
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| Zdroj: | In Sensors & Actuators: A. Physical 15 August 2016 247:482-493 |
| Databáze: | ScienceDirect |
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