Thick PECVD silicon dioxide films for MEMS devices
| Autor: | Ho, Shih-Shian, Rajgopal, Srihari, Mehregany, Mehran |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1 April 2016 240:1-9 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Ho, Shih-Shian, Rajgopal, Srihari, Mehregany, Mehran |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1 April 2016 240:1-9 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect