Capacitive inertial sensing at high temperatures of up to 400 °C

Autor: Asiatici, Mikhail, Fischer, Andreas C., Rödjegård, Henrik, Haasl, Sjoerd, Stemme, Göran, Niklaus, Frank
Zdroj: In Sensors & Actuators: A. Physical 1 February 2016 238:361-368
Databáze: ScienceDirect