Comparing membrane- and cantilever-based surface stress sensors for reproducibility
| Autor: | Loizeau, Frédéric, Akiyama, Terunobu, Gautsch, Sebastian, Vettiger, Peter, Yoshikawa, Genki, de Rooij, Nico F. |
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| Zdroj: | In Sensors & Actuators: A. Physical 1 June 2015 228:9-15 |
| Databáze: | ScienceDirect |
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