Simulation, fabrication and characterization of an all-metal contact-enhanced triaxial inertial microswitch with low axial disturbance

Autor: Chen, Wenguo, Wang, Yan, Ding, Guifu, Wang, Hong, Zhao, Xiaolin, Yang, Zhuoqing
Zdroj: In Sensors & Actuators: A. Physical 1 December 2014 220:194-203
Databáze: ScienceDirect