A cubic isotropic X-ray dose detector diode fabricated by DRIE of SOI substrates
| Autor: | Norlin, Peter, Öberg, Olof, Junique, Stéphane, Kaplan, Wlodek, Andersson, Jan Y., Nilsson, Görgen |
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| Zdroj: | In Sensors & Actuators: A. Physical 1 July 2014 213:116-121 |
| Databáze: | ScienceDirect |
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