Highly insulating, fully porous silicon substrates for high temperature micro-hotplates
| Autor: | Lucklum, Frieder, Schwaiger, Alexander, Jakoby, Bernhard |
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| Zdroj: | In Sensors & Actuators: A. Physical 1 July 2014 213:35-42 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect