Quasi-static micromirror with enlarged deflection based on aluminum nitride thin film springs
| Autor: | Weinberger, Stefan, Nguyen, Tran Trung, Ament, Christoph, Hoffmann, Martin |
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| Zdroj: | In Sensors & Actuators: A. Physical 1 April 2014 210:165-174 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect