A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication

Autor: Olsson, Roy H., III, Hattar, Khalid, Homeijer, Sara J., Wiwi, Michael, Eichenfield, Matthew, Branch, Darren W., Baker, Michael S., Nguyen, Janet, Clark, Blythe, Bauer, Todd, Friedmann, Thomas A.
Zdroj: In Sensors & Actuators: A. Physical 1 March 2014 209:183-190
Databáze: ScienceDirect
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