MEMS Fabry–Pérot optical accelerometer employing mechanical amplification via a V-beam structure
| Autor: | Davies, Edward, George, David S., Gower, Malcolm C., Holmes, Andrew S. |
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| Zdroj: | In Sensors & Actuators: A. Physical 15 August 2014 215:22-29 |
| Databáze: | ScienceDirect |
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