A low-cost built-in self-test method for thermally actuated resistive MEMS sensors
| Autor: | Legendre, O., Bertin, H., Mathias, H., Megherbi, S., Juillard, J., Colinet, E., Jafari, K. |
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| Zdroj: | In Sensors & Actuators: A. Physical 1 May 2013 194:8-15 |
| Databáze: | ScienceDirect |
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