Fabrication and characterization of a double-heater based MEMS thermal flow sensor
| Autor: | Sun, Jianhai, Cui, Dafu, Zhang, Lulu, Chen, Xing, Cai, Haoyuan, Li, Hui |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 15 April 2013 193:25-29 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect