Pressure sensitivity of piezoresistive nickel–carbon Ni:a-C:H thin films
| Autor: | Uhlig, Steffen, Schmid-Engel, Hanna, Speicher, Tobias, Schultes, Günter |
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| Zdroj: | In Sensors & Actuators: A. Physical 15 April 2013 193:129-135 |
| Databáze: | ScienceDirect |
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