Determination of mechanical properties of a MEMS directional sound sensor using a nanoindenter
| Autor: | Downey, R.H., Brewer, L.N., Karunasiri, G. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1 March 2013 191:27-33 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Downey, R.H., Brewer, L.N., Karunasiri, G. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1 March 2013 191:27-33 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect