Design and simulation of MEMS-based dual-axis fluidic angular velocity sensor
| Autor: | Dinh, Thien Xuan, Ogami, Yoshifumi |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 15 January 2013 189:61-66 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Dinh, Thien Xuan, Ogami, Yoshifumi |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 15 January 2013 189:61-66 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect