A novel checker-patterned AlN MEMS resonator as gravimetric sensor
| Autor: | Heidari, Amir, Yoon, Yong-Jin, Lee, Man I, Khine, Lynn, Park, Mi Kyoung, Tsai, Julius Ming Lin |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 15 January 2013 189:298-306 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect