Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition
| Autor: | Puurunen, R.L., Häärä, A., Saloniemi, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M., Kattelus, H. |
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| Zdroj: | In Sensors & Actuators: A. Physical December 2012 188:240-245 |
| Databáze: | ScienceDirect |
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