Characterization of a SAW-Pirani vacuum sensor for two different operating modes
| Autor: | Mercier, D., Bordel, G., Brunet-Manquat, P., Verrun, S., Elmazria, O., Sarry, F., Belgacem, B., Bounoua, J. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical December 2012 188:41-47 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect